Taiwan Semiconductor Manufacturing Co. evacuated factories following a 6.4 magnitude earthquake near the city of Chiayi that injured at least four people and suspended work at factories across the island’s south.

Chipmaker TSMC said on Tuesday that all its sites were operating following an overnight 6.4 magnitude earthquake in southern Taiwan that was centred on a mountainous rural area and caused only minor damage and light injuries.

Taiwan experienced a 6.4 magnitude earthquake on Tuesday. The quake struck near the city of Chiayi in Taiwan’s south, according to Reuters, and it shook buildings in Taipei. TSMC said it evacuated personnel from some buildings and the science park in Tainan,