The ability to create intricate, nano-scale patterns is at the heart of nanotechnology ... narrow features found in micro-electro-mechanical systems (MEMS). However, X-ray lithography requires a ...

Advanced techniques like extreme ultraviolet (EUV) lithography are being developed to overcome these limitations and reduce feature sizes further.

Research involves micro- and nano-electromechanical systems (MEMS and NEMS) for transducers, sensors and actuators with a new interdisciplinary initiative in engineering for quantum technology ...

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized devices. We are collaborating with Prof. Victor Bright’s ...

Areas of research supported include nano/microelectronics, integrated photonics, optoelectronics, photovoltaics, nanomaterials, MEMs (Micro-electro-mechanical Systems) and BioMEMs.