The first Russian photolithography tool ... whereas AMD used this node for its K6 processor in 1997. Even for Russia, a 350nm fabrication process may be considered outdated as two of the ...

This pattern can then guide further processes, such as etching or doping, to create the final microstructures. Photolithography offers high precision, repeatability, and the ability to fabricate ...

This array was used for the first time in a deep ultraviolet (DUV) maskless photolithography system. Photolithography is essential to producing integrated circuit chips, one of the fundamental ...