The ability to create intricate, nano-scale patterns is at the heart of nanotechnology ... narrow features found in micro-electro-mechanical systems (MEMS). However, X-ray lithography requires a ...

A class 100/1000 clean room supported the development and fabrication of RF MEMs systems including reconfigurable MIMO antennas and devices. Plans for the Micro/Nano lab include wet etch, ...

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized devices. We are collaborating with Prof. Victor Bright’s ...

Micromachining is a core technology that enables the MEMS and related new approaches in engineering and science. This course will cover the fundamental fabrication and theoretical issues of the ...