This pattern can then guide further processes, such as etching or doping, to create the final microstructures. Photolithography offers high precision, repeatability, and the ability to fabricate ...

Extreme ultraviolet (EUV) lithography is the next step in this trend. It uses radiation of wavelength 13.5 nm, thereby offering significant potential to extend the resolution of photolithography ...

Lin returned to China in 2021 as part of the country’s overseas high-level recruitment drive and founded the advanced photolithography technology research group that was responsible for the paper.